The Agilent(now Keysight Technologies)5517C is a high-performance HeNe laser head designed for precision dual-frequency interferometry and widely used in laser interferometer positioning systems.Here are its key features and technical specifications:

Product Features

High Precision and Stability:Provides highly stable and accurate 633 nm wavelength light for precision dual-frequency interferometry.

Multiple Configuration Options:Supports a variety of beam diameters(3 mm,6 mm,9 mm)and power options.

Fast Measurement Capability:Suitable for high-speed motion measurement applications such as semiconductor lithography and flat panel displays.

High Reliability:Mean Time Between Failures(MTBF)exceeds 50,000 hours.

Technical Specifications

Maximum Linear Speed:711 mm/s.

Reference Frequency:2.4 to 3.0 MHz.

Beam Diameter:

Standard:6 mm.

Option 003:3 mm.

Option 009:9 mm.

Output Power:

Minimum:180µW.

Option H03:300µW.

Option H05:240µW.

Option H07:400µW.

Maximum:1 mW.

Beam height:79.5±1.0 mm.

Warm-up time:90 minutes.

Input power requirement:

+15 V±0.3 V(3.0 A maximum).

-15 V±0.3 V(0.3 A maximum).

Applications

Semiconductor lithography:For high-precision semiconductor manufacturing processes.

Flat panel displays:For the production of liquid crystal displays(LCDs)and organic light-emitting diodes(OLEDs).

VME and PC-based laser interferometer systems:For a variety of industrial automation and precision measurement applications.

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